JPH0220328U - - Google Patents
Info
- Publication number
- JPH0220328U JPH0220328U JP9815188U JP9815188U JPH0220328U JP H0220328 U JPH0220328 U JP H0220328U JP 9815188 U JP9815188 U JP 9815188U JP 9815188 U JP9815188 U JP 9815188U JP H0220328 U JPH0220328 U JP H0220328U
- Authority
- JP
- Japan
- Prior art keywords
- inert gas
- semiconductor wafers
- heat
- evacuation chamber
- preliminary evacuation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011261 inert gas Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 3
- 239000007789 gas Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9815188U JPH0220328U (en]) | 1988-07-25 | 1988-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9815188U JPH0220328U (en]) | 1988-07-25 | 1988-07-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0220328U true JPH0220328U (en]) | 1990-02-09 |
Family
ID=31324158
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9815188U Pending JPH0220328U (en]) | 1988-07-25 | 1988-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220328U (en]) |
-
1988
- 1988-07-25 JP JP9815188U patent/JPH0220328U/ja active Pending